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|Title:||Pulsed laser deposition of lead-zirconate-titanate thin films and multilayered heterostructures|
|Authors:||Zhu, T.J. |
|Citation:||Zhu, T.J., Lu, L., Lai, M.O. (2005-09). Pulsed laser deposition of lead-zirconate-titanate thin films and multilayered heterostructures. Applied Physics A: Materials Science and Processing 81 (4) : 701-714. ScholarBank@NUS Repository. https://doi.org/10.1007/s00339-005-3227-z|
|Abstract:||There is an increasing interest in lead-zirconate-titanate (PZT) based ferroelectric thin film and devices in recent years. Pulsed laser deposition (PLD) technique has been demonstrated to be a versatile and successful tool for the deposition of epitaxial multi-component metal oxide films and heterostructures. This review presents a reasonable understanding of the relationship between PLD processing and composition, crystal structure and orientation of PZT ferroelectric thin films, and heterostructures. Processing-related issues from PLD of PZT thin films and material-integration strategies developed to fabrication of highly oriented or epitaxial PZT thin film based capacitors with excellent ferroelectric properties are discussed in detail. © Springer-Verlag 2005.|
|Source Title:||Applied Physics A: Materials Science and Processing|
|Appears in Collections:||Staff Publications|
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