Please use this identifier to cite or link to this item: https://doi.org/10.1007/s00339-005-3227-z
Title: Pulsed laser deposition of lead-zirconate-titanate thin films and multilayered heterostructures
Authors: Zhu, T.J. 
Lu, L. 
Lai, M.O. 
Issue Date: Sep-2005
Citation: Zhu, T.J., Lu, L., Lai, M.O. (2005-09). Pulsed laser deposition of lead-zirconate-titanate thin films and multilayered heterostructures. Applied Physics A: Materials Science and Processing 81 (4) : 701-714. ScholarBank@NUS Repository. https://doi.org/10.1007/s00339-005-3227-z
Abstract: There is an increasing interest in lead-zirconate-titanate (PZT) based ferroelectric thin film and devices in recent years. Pulsed laser deposition (PLD) technique has been demonstrated to be a versatile and successful tool for the deposition of epitaxial multi-component metal oxide films and heterostructures. This review presents a reasonable understanding of the relationship between PLD processing and composition, crystal structure and orientation of PZT ferroelectric thin films, and heterostructures. Processing-related issues from PLD of PZT thin films and material-integration strategies developed to fabrication of highly oriented or epitaxial PZT thin film based capacitors with excellent ferroelectric properties are discussed in detail. © Springer-Verlag 2005.
Source Title: Applied Physics A: Materials Science and Processing
URI: http://scholarbank.nus.edu.sg/handle/10635/61177
ISSN: 09478396
DOI: 10.1007/s00339-005-3227-z
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