Please use this identifier to cite or link to this item: https://doi.org/10.1016/j.precisioneng.2005.03.001
Title: Nanoscale surface deformation inspection using FFT and phase-shifting combined interferometry
Authors: Quan, C. 
Wang, S.H. 
Tay, C.J. 
Keywords: Fast Fourier transform (FFT)
Micro-components
Non-destructive measurement
Optical interferometry
Phase-shifting technique
Piezoelectric transducer (PZT)
Issue Date: Jan-2006
Source: Quan, C., Wang, S.H., Tay, C.J. (2006-01). Nanoscale surface deformation inspection using FFT and phase-shifting combined interferometry. Precision Engineering 30 (1) : 23-31. ScholarBank@NUS Repository. https://doi.org/10.1016/j.precisioneng.2005.03.001
Abstract: In this paper, a flexible optical interferometer incorporated with both fast Fourier transform (FFT) and phase-shifting method is developed for three-dimensional (3D) testing of micro-components. Using light interference, microscopic optics, piezoelectric transducer (PZT) nanoscanning and a CCD camera, the proposed system can detect deformation and surface contour in the order of nanometers. An application of the proposed technique is demonstrated using two micro-components: a micro-beam in an accelerometer and a micromirror. The resulting interference fringes that are related to the deformation and surface contour are analyzed using FFT method or three-step phase-shifting method depending on the test surface features. Experimental results show the feasibility of the proposed method for 3D deformation and surface contour measurement of micro-components. © 2005 Elsevier Inc. All rights reserved.
Source Title: Precision Engineering
URI: http://scholarbank.nus.edu.sg/handle/10635/60870
ISSN: 01416359
DOI: 10.1016/j.precisioneng.2005.03.001
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