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|Title:||Microscopic surface contouring by fringe projection method|
|Authors:||Quan, C. |
Microscopic surface contouring
|Citation:||Quan, C., Tay, C.J., He, X.Y., Kang, X., Shang, H.M. (2002-10). Microscopic surface contouring by fringe projection method. Optics and Laser Technology 34 (7) : 547-552. ScholarBank@NUS Repository. https://doi.org/10.1016/S0030-3992(02)00070-1|
|Abstract:||This paper describes the use of optical fringe projection method for 3D surface profile and deformation measurement of micro-components. In this method, sinusoidal linear fringes are projected on a micro-component surface by a grating phase shifting projector and a long working distance microscope (LWDM). The image of the fringe pattern is captured by a high-resolution CCD camera and another LWDM and processed by phase-shifting technique. A simple procedure is described which enables calibration of the optical set-up for subsequent quantitative measurement of micro-components of unknown shapes. This method is relatively simple and accurate, and is capable of conducting fully automated measurements. In this paper, two micro-components, a micro-mirror (0.1 mm × 0.1 mm) and a micro-electrode pad are used to demonstrate deformation measurement and microscopic surface contouring. © 2002 Published by Elsevier Science Ltd.|
|Source Title:||Optics and Laser Technology|
|Appears in Collections:||Staff Publications|
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