Please use this identifier to cite or link to this item:
Title: High speed laser scanning using MEMS driven in-plane vibratory grating: Design, modeling and fabrication
Authors: Du, Y. 
Zhou, G. 
Cheo, K.K.L. 
Zhang, Q.
Feng, H.
Yang, B.
Chau, F.S. 
Keywords: Diffraction grating
Micro-opto-electromechanical systems (MOEMS)
Issue Date: Nov-2009
Source: Du, Y., Zhou, G., Cheo, K.K.L., Zhang, Q., Feng, H., Yang, B., Chau, F.S. (2009-11). High speed laser scanning using MEMS driven in-plane vibratory grating: Design, modeling and fabrication. Sensors and Actuators, A: Physical 156 (1) : 134-144. ScholarBank@NUS Repository.
Abstract: In this paper, we report a design, modeling and fabrication of a microelectromechanical system (MEMS) based in-plane vibratory sub-wavelength diffraction grating scanner for high optical efficiency, high speed laser scanning applications. This paper demonstrates that with careful design, optical efficiency of more than 75% is experimentally achievable with a simple gold-coated binary sub-wavelength grating. High frequency scanning of 55.01 kHz with an optical scan angle of 5.2° is achievable even when operated in air. The device demonstrated has a 1 mm diameter grating. Through consideration of the mass of the suspension springs, stress alleviation beams and fabrication imperfections, a theoretical model is proposed which can estimate the dynamic performance close to the actual operating condition. © 2009 Elsevier B.V. All rights reserved.
Source Title: Sensors and Actuators, A: Physical
ISSN: 09244247
DOI: 10.1016/j.sna.2009.02.011
Appears in Collections:Staff Publications

Show full item record
Files in This Item:
There are no files associated with this item.


checked on Mar 7, 2018


checked on Jan 30, 2018

Page view(s)

checked on Mar 11, 2018

Google ScholarTM



Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.