Please use this identifier to cite or link to this item: https://doi.org/10.1016/j.sna.2009.02.011
Title: High speed laser scanning using MEMS driven in-plane vibratory grating: Design, modeling and fabrication
Authors: Du, Y. 
Zhou, G. 
Cheo, K.K.L. 
Zhang, Q.
Feng, H.
Yang, B.
Chau, F.S. 
Keywords: Diffraction grating
Micro-opto-electromechanical systems (MOEMS)
Micro-scanners
Issue Date: Nov-2009
Source: Du, Y., Zhou, G., Cheo, K.K.L., Zhang, Q., Feng, H., Yang, B., Chau, F.S. (2009-11). High speed laser scanning using MEMS driven in-plane vibratory grating: Design, modeling and fabrication. Sensors and Actuators, A: Physical 156 (1) : 134-144. ScholarBank@NUS Repository. https://doi.org/10.1016/j.sna.2009.02.011
Abstract: In this paper, we report a design, modeling and fabrication of a microelectromechanical system (MEMS) based in-plane vibratory sub-wavelength diffraction grating scanner for high optical efficiency, high speed laser scanning applications. This paper demonstrates that with careful design, optical efficiency of more than 75% is experimentally achievable with a simple gold-coated binary sub-wavelength grating. High frequency scanning of 55.01 kHz with an optical scan angle of 5.2° is achievable even when operated in air. The device demonstrated has a 1 mm diameter grating. Through consideration of the mass of the suspension springs, stress alleviation beams and fabrication imperfections, a theoretical model is proposed which can estimate the dynamic performance close to the actual operating condition. © 2009 Elsevier B.V. All rights reserved.
Source Title: Sensors and Actuators, A: Physical
URI: http://scholarbank.nus.edu.sg/handle/10635/60446
ISSN: 09244247
DOI: 10.1016/j.sna.2009.02.011
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