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|Title:||Frequency interference between two mesa-shaped quartz crystal microbalances|
|Citation:||Shen, F., O'Shea, S.J., Lee, K.H., Lu, P., Ng, T.Y. (2003-06). Frequency interference between two mesa-shaped quartz crystal microbalances. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control 50 (6) : 668-675. ScholarBank@NUS Repository. https://doi.org/10.1109/TUFFC.2003.1209554|
|Abstract:||The multichannel quartz crystal microbalance (MQCM) is very attractive for biosensor applications. The principle of the MQCM design involves fabricating arrays of quartz microbalances on a single substrate, and it is important that the individual sensor performance is not influenced by the neighboring devices. Feasible ways to control the coupling of acoustical energy within a MQCM structure are to increase the difference in the resonance frequency between the electroded and unelectroded portions of the substrate; and a practical way to achieve this is to use mesa structures. In this paper, the frequency interference between two mesa-shaped quartz crystal microbalances is investigated using Mindlin's theory. The results show that even a very small mesa height (∼5% of the plate thickness) can greatly reduce the frequency interference and more effectively trap the acoustic energy. This allows for a broader design window and higher packing density for MQCM applications.|
|Source Title:||IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control|
|Appears in Collections:||Staff Publications|
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