Please use this identifier to cite or link to this item: https://doi.org/10.1109/TUFFC.2003.1209554
Title: Frequency interference between two mesa-shaped quartz crystal microbalances
Authors: Shen, F.
O'Shea, S.J.
Lee, K.H. 
Lu, P.
Ng, T.Y.
Issue Date: Jun-2003
Source: Shen, F.,O'Shea, S.J.,Lee, K.H.,Lu, P.,Ng, T.Y. (2003-06). Frequency interference between two mesa-shaped quartz crystal microbalances. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control 50 (6) : 668-675. ScholarBank@NUS Repository. https://doi.org/10.1109/TUFFC.2003.1209554
Abstract: The multichannel quartz crystal microbalance (MQCM) is very attractive for biosensor applications. The principle of the MQCM design involves fabricating arrays of quartz microbalances on a single substrate, and it is important that the individual sensor performance is not influenced by the neighboring devices. Feasible ways to control the coupling of acoustical energy within a MQCM structure are to increase the difference in the resonance frequency between the electroded and unelectroded portions of the substrate; and a practical way to achieve this is to use mesa structures. In this paper, the frequency interference between two mesa-shaped quartz crystal microbalances is investigated using Mindlin's theory. The results show that even a very small mesa height (∼5% of the plate thickness) can greatly reduce the frequency interference and more effectively trap the acoustic energy. This allows for a broader design window and higher packing density for MQCM applications.
Source Title: IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
URI: http://scholarbank.nus.edu.sg/handle/10635/60373
ISSN: 08853010
DOI: 10.1109/TUFFC.2003.1209554
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