Please use this identifier to cite or link to this item: https://doi.org/10.1088/0960-1317/12/6/301
Title: Determination of the material properties of multilayered thin films using the elastic wave propagation approach
Authors: Xu, Y.G.
Liu, G.R. 
Issue Date: Nov-2002
Citation: Xu, Y.G., Liu, G.R. (2002-11). Determination of the material properties of multilayered thin films using the elastic wave propagation approach. Journal of Micromechanics and Microengineering 12 (6) : 723-729. ScholarBank@NUS Repository. https://doi.org/10.1088/0960-1317/12/6/301
Abstract: In this paper we propose the use of an elastic wave propagation approach to determine the material properties of multilayered thin films. In this approach, the material properties of each layer in the multilayered thin films are determined by solving an optimization problem of minimizing the difference between the measured and calculated displacement response acquired on the surface of the thin films. The calculated displacement response is generated from the trial material properties by using a computational model of elastic wave propagation. A novel evolutionary algorithm, capable of searching the global optima, is used to solve the optimization problem and thus to determine the actual material properties. Numerical simulations are performed in both noise-free and noisy environments. The simulated results demonstrate the effectiveness of the present approach.
Source Title: Journal of Micromechanics and Microengineering
URI: http://scholarbank.nus.edu.sg/handle/10635/59887
ISSN: 09601317
DOI: 10.1088/0960-1317/12/6/301
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