Please use this identifier to cite or link to this item: https://doi.org/10.1142/S0218194005001975
Title: Control-oriented modeling of 2D torsional micromirror
Authors: Zhao, Y.
Tay, F.E.H. 
Chau, F.S. 
Zhou, G. 
Keywords: MEMS
Micromirror
Modelling
Issue Date: Apr-2005
Source: Zhao, Y., Tay, F.E.H., Chau, F.S., Zhou, G. (2005-04). Control-oriented modeling of 2D torsional micromirror. International Journal of Software Engineering and Knowledge Engineering 15 (2) : 249-255. ScholarBank@NUS Repository. https://doi.org/10.1142/S0218194005001975
Abstract: This paper presents a simplified model of 2D torsional micromirror for control design. The micromirror system is modeled as a two inputs two outputs (TITO) system with nonlinear electrostatic torques, which are coupled with the two inputs and the two tilt angles. The coupling property of the electrostatic torques makes it difficult to design the control law. To surmount the problem, a new model based on extracting the dominant nonlinear terms and Taylor's expansion is proposed. The micromirror system together with the simplified model is coded in Matlab™ S-function. The simulation result shows that the model is feasible for control design. © World Scientific Publishing Company.
Source Title: International Journal of Software Engineering and Knowledge Engineering
URI: http://scholarbank.nus.edu.sg/handle/10635/59797
ISSN: 02181940
DOI: 10.1142/S0218194005001975
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