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https://doi.org/10.1016/j.sna.2005.07.006
| Title: | Characterization of localized laser assisted eutectic bonds | Authors: | Tan, A.W.Y. Tay, F.E.H. Zhang, J. |
Keywords: | Eutectic Gold-tin Interfacial characterization Laser bonding Low temperature Single crystal quartz-to-silicon |
Issue Date: | 10-Jan-2006 | Citation: | Tan, A.W.Y., Tay, F.E.H., Zhang, J. (2006-01-10). Characterization of localized laser assisted eutectic bonds. Sensors and Actuators, A: Physical 125 (2) : 573-585. ScholarBank@NUS Repository. https://doi.org/10.1016/j.sna.2005.07.006 | Abstract: | An innovative bonding process for silicon and single crystal quartz has been developed and investigated using various material science characterization methods, such as TOF-SIMS, SEM, EDX and XRD. The bonding process combines the principles of laser transmission welding, eutectic bonding and bonding by localized heating. A focused laser beam (low power, max. 0.83 W) is transmitted through a quartz medium to intermediate layers of chromium, gold and tin at the silicon-quartz interface to provide localized heating and bonding. This bonding process is particularly suitable for bonding wafers containing temperature sensitive devices as it confines the temperature increase to a small area. Bond strength of over 15 MPa is comparable to most localized bonding schemes. This process provides a simple yet robust bonding solution with rapid processing time, selectivity of bonded area and corrosion resistant joints. © 2005 Elsevier B.V. All rights reserved. | Source Title: | Sensors and Actuators, A: Physical | URI: | http://scholarbank.nus.edu.sg/handle/10635/59697 | ISSN: | 09244247 | DOI: | 10.1016/j.sna.2005.07.006 |
| Appears in Collections: | Staff Publications |
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