Please use this identifier to cite or link to this item: https://doi.org/10.1364/AO.45.007785
Title: Characterization of dynamic microgyroscopes by use of temporal digital image correlation
Authors: Yang, F.
He, X.
Quan, C. 
Issue Date: 20-Oct-2006
Source: Yang, F., He, X., Quan, C. (2006-10-20). Characterization of dynamic microgyroscopes by use of temporal digital image correlation. Applied Optics 45 (30) : 7785-7790. ScholarBank@NUS Repository. https://doi.org/10.1364/AO.45.007785
Abstract: The advanced mechanical testing of micro-electromechanical systems (MEMS) is necessary to provide feedback of measurements that can help the designer optimize MEMS structures and improve the reliability and stability of MEMS. We describe a digital image correlation (DIC) method for dynamic characterization of MEMS using an optical microscope with a high-speed complementary metaloxide semiconductor-based camera. The mechanical performance of a series of microgyroscopes is tested. The DIC method is employed to measure the microgyroscope in-plane displacement with subpixel accuracy. Use of the DIG method is less restrictive on the surface quality of the specimen and simplifies the measurement system. On the basis of a series of temporal digital images grabbed by a high-speed camera, the stability characteristic of the microgyroscopes is analyzed. In addition, the quality factors of the microgyroscopes are determined and agree well with other experimental methods. © 2006 Optical Society of America.
Source Title: Applied Optics
URI: http://scholarbank.nus.edu.sg/handle/10635/59693
ISSN: 00036935
DOI: 10.1364/AO.45.007785
Appears in Collections:Staff Publications

Show full item record
Files in This Item:
There are no files associated with this item.

SCOPUSTM   
Citations

9
checked on Dec 6, 2017

WEB OF SCIENCETM
Citations

8
checked on Nov 21, 2017

Page view(s)

36
checked on Dec 10, 2017

Google ScholarTM

Check

Altmetric


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.