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Title: Characterization of dynamic microgyroscopes by use of temporal digital image correlation
Authors: Yang, F.
He, X.
Quan, C. 
Issue Date: 20-Oct-2006
Citation: Yang, F., He, X., Quan, C. (2006-10-20). Characterization of dynamic microgyroscopes by use of temporal digital image correlation. Applied Optics 45 (30) : 7785-7790. ScholarBank@NUS Repository.
Abstract: The advanced mechanical testing of micro-electromechanical systems (MEMS) is necessary to provide feedback of measurements that can help the designer optimize MEMS structures and improve the reliability and stability of MEMS. We describe a digital image correlation (DIC) method for dynamic characterization of MEMS using an optical microscope with a high-speed complementary metaloxide semiconductor-based camera. The mechanical performance of a series of microgyroscopes is tested. The DIC method is employed to measure the microgyroscope in-plane displacement with subpixel accuracy. Use of the DIG method is less restrictive on the surface quality of the specimen and simplifies the measurement system. On the basis of a series of temporal digital images grabbed by a high-speed camera, the stability characteristic of the microgyroscopes is analyzed. In addition, the quality factors of the microgyroscopes are determined and agree well with other experimental methods. © 2006 Optical Society of America.
Source Title: Applied Optics
ISSN: 00036935
DOI: 10.1364/AO.45.007785
Appears in Collections:Staff Publications

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