Please use this identifier to cite or link to this item: https://doi.org/10.1109/JSTQE.2009.2034271
Title: A silicon platform with MEMS active alignment function and its potential application in Si-photonics packaging
Authors: Zhang, Q.X.
Du, Y. 
Tan, C.W.
Zhang, J.
Yu, M.B.
Yeoh, W.G.
Lo, G.-Q.
Kwong, D.-L.
Keywords: Active alignment
Assembly
Electrothermal actuation
Mechanical locking
Microactuators
Si photonics
Issue Date: Jan-2010
Source: Zhang, Q.X., Du, Y., Tan, C.W., Zhang, J., Yu, M.B., Yeoh, W.G., Lo, G.-Q., Kwong, D.-L. (2010-01). A silicon platform with MEMS active alignment function and its potential application in Si-photonics packaging. IEEE Journal on Selected Topics in Quantum Electronics 16 (1) : 267-275. ScholarBank@NUS Repository. https://doi.org/10.1109/JSTQE.2009.2034271
Abstract: A silicon (Si) platform, which consists of passive alignment structures (V-grooves), active microelectromechanical systems (MEMS) alignment components, mechanical locking mechanisms, and predeposited goldtin soldering pads is developed to address the submicron accuracy assembly requirement of the discrete laser diode (LD) to a small core in-chip Si waveguide (WG). A 2-D in situ active alignment of a ball lens in LD-ball lensSi-WG coupling system is presented here. The 1550-nm DFB LD and the passive Si-photonics chip are attached onto the platform, using flipchip bonding process. The 2-D alignment of the ball lens is then achieved through the in-plane motion of the suspension arms and the specially designed V-groove. The position of the ball lens is subsequently fixed by the locking mechanism mechanically. MEMS electrothermal V-beam actuators, which can provide large force with a large displacement under a low driving voltage, i.e., 50μm at 25 V are employed in this platform. The effectiveness and stability of the arm locking function have been tested with a shift of 0.1 μm larafter vibration testing (10g, 2 kHz). The integrated aligning and locking functions of the MEMS platform are also demonstrated through the LD-ball lensSi-WG coupling system. These results show the potential of this MEMS platform in hybrid integrated Si photonics and applications that consist of LD-ball lensSi-WG coupling system, e.g., the transmitter and transceiver. © 2006 IEEE.
Source Title: IEEE Journal on Selected Topics in Quantum Electronics
URI: http://scholarbank.nus.edu.sg/handle/10635/59262
ISSN: 1077260X
DOI: 10.1109/JSTQE.2009.2034271
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