Please use this identifier to cite or link to this item: https://doi.org/10.1007/s00542-006-0260-6
Title: Variable optical attenuator using planar light attenuation scheme based on rotational and translational misalignment
Authors: Lee, C. 
Issue Date: Jan-2007
Source: Lee, C. (2007-01). Variable optical attenuator using planar light attenuation scheme based on rotational and translational misalignment. Microsystem Technologies 13 (1) : 41-48. ScholarBank@NUS Repository. https://doi.org/10.1007/s00542-006-0260-6
Abstract: In the last decade, extensive developments of microelectromechanical systems based thermal actuator and/or electrothermal actuators have been dedicated to the applications, such as data storage devices, relays and optical switches, etc. In this paper, we demonstrated a novel planar micromechanism comprising a tilted mirror driven by a V-beam electrothermal actuator via a link beam. This electrothermally driven tilted mirror can have static displacement with a motion trace including rotational and translational movement. The rotational and translational misalignment of reflected light spot toward the core of output port fiber will lead to light attenuation. In other words, the attenuation is controlled in terms of the position of tilted mirror depending on driving dc voltage. This new micromechanism has granted us a more efficient way to perform the light attenuation regarding to the other kinds of planar variable optical attenuators. These devices were fabricated by the deep reactive ion etching process and can reach 30-dB attenuation at 7.5 V driving voltage. The polarization dependant loss is less than 0.1 dB within the 30-dB attenuation region. The static and transient characteristics of devices operated at ambient room temperature environment show good repeatability and stability. © Springer-Verlag 2007.
Source Title: Microsystem Technologies
URI: http://scholarbank.nus.edu.sg/handle/10635/57771
ISSN: 09467076
DOI: 10.1007/s00542-006-0260-6
Appears in Collections:Staff Publications

Show full item record
Files in This Item:
There are no files associated with this item.

SCOPUSTM   
Citations

7
checked on Dec 5, 2017

WEB OF SCIENCETM
Citations

7
checked on Dec 5, 2017

Page view(s)

30
checked on Dec 11, 2017

Google ScholarTM

Check

Altmetric


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.