Please use this identifier to cite or link to this item: https://doi.org/10.1109/JMEMS.2011.2162488
Title: Piezoelectric MEMS energy harvester for low-frequency vibrations with wideband operation range and steadily increased output power
Authors: Liu, H.
Tay, C.J. 
Quan, C. 
Kobayashi, T.
Lee, C. 
Keywords: Low-frequency vibrations
microelectromechanical systems (MEMS)
piezoelectric energy harvester
piezoelectric thin film (PZT)
wideband
Issue Date: Oct-2011
Source: Liu, H., Tay, C.J., Quan, C., Kobayashi, T., Lee, C. (2011-10). Piezoelectric MEMS energy harvester for low-frequency vibrations with wideband operation range and steadily increased output power. Journal of Microelectromechanical Systems 20 (5) : 1131-1142. ScholarBank@NUS Repository. https://doi.org/10.1109/JMEMS.2011.2162488
Abstract: A piezoelectric MEMS energy harvester (EH) with low resonant frequency and wide operation bandwidth was designed, microfabricated, and characterized. The MEMS piezoelectric energy harvesting cantilever consists of a silicon beam integrated with piezoelectric thin film (PZT) elements parallel-arranged on top and a silicon proof mass resulting in a low resonant frequency of 36 Hz. The whole chip was assembled onto a metal carrier with a limited spacer such that the operation frequency bandwidth can be widened to 17 Hz at the input acceleration of 1.0 g during frequency up-sweep. Load voltage and power generation for different numbers of PZT elements in series and in parallel connections were compared and discussed based on experimental and simulation results. Moreover, the EH device has a wideband and steadily increased power generation from 19.4 nW to 51.3 nW within the operation frequency bandwidth ranging from 30 Hz to 47 Hz at 1.0 g. Based on theoretical estimation, a potential output power of 0.53 μW could be harvested from low and irregular frequency vibrations by adjusting the PZT pattern and spacer thickness to achieve an optimal design. © 2011 IEEE.
Source Title: Journal of Microelectromechanical Systems
URI: http://scholarbank.nus.edu.sg/handle/10635/57066
ISSN: 10577157
DOI: 10.1109/JMEMS.2011.2162488
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