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https://doi.org/10.1109/LED.2012.2195152
| Title: | PDMS-coated piezoresistive NEMS diaphragm for chloroform vapor detection | Authors: | Guo, H. Lou, L. Chen, X. Lee, C. |
Keywords: | Chloroform vapor sensor nanoelectromechanical systems (NEMS) diaphragm piezoresistive silicon nanowires (SiNWs) polydimethylsiloxane (PDMS) film |
Issue Date: | 2012 | Citation: | Guo, H., Lou, L., Chen, X., Lee, C. (2012). PDMS-coated piezoresistive NEMS diaphragm for chloroform vapor detection. IEEE Electron Device Letters 33 (7) : 1078-1080. ScholarBank@NUS Repository. https://doi.org/10.1109/LED.2012.2195152 | Abstract: | A polydimethylsiloxane (PDMS)-coated nanoelectromechanical systems diaphragm embedded with silicon nanowires (SiNWs) is proposed for chloroform vapor detection at room temperature. The PDMS film swells and leads to the deformation of micro-diaphragm when it is exposed to vapor. The SiNWs are connected in a Wheatstone bridge which is used to transform the deformation into a measurable output voltage. This sensor provides good linearity, sensitivity, and repeatability. The sensitivity of our sensor for chloroform vapor detection is 1.41 μV/V/ppm while the power consumption is as low as 2 μW. © 2012 IEEE. | Source Title: | IEEE Electron Device Letters | URI: | http://scholarbank.nus.edu.sg/handle/10635/57002 | ISSN: | 07413106 | DOI: | 10.1109/LED.2012.2195152 |
| Appears in Collections: | Staff Publications |
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