Nondestructive evaluation of nanoscale structures: Inverse scattering approach

Abstract

In this paper, we demonstrate how subwavelength images of nanoscale structures can be obtained from the measurements of electromagnetic fields scattered by the objects, via an enhanced inverse scattering approach, which takes into account the multiple-scattering effect and allows the detectors to be placed in the far field. Specifically, the method is a combination of the transverse electric (TE) incidence and the subspace-based optimization method (SOM). It is observed that a wide continuous range of integer values of leading singular values can yield satisfactory reconstruction results, and even if the antennas for radiating and receiving the electromagnetic wave can only be arranged on one side of the scatterers, due to the limitation in the real world, the proposed method is still capable of achieving high resolution for the reconstructed patterns with rapid convergence rates and robust immunity to high noise corruption (33%). © 2010 Springer-Verlag.