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https://doi.org/10.1016/j.mee.2006.01.003
| Title: | Nanoscale imaging with a portable field emission scanning electron microscope | Authors: | Khursheed, A. Nelliyan, K. Ding, Y. |
Keywords: | Immersion electron lens Landing energy SEM |
Issue Date: | Apr-2006 | Citation: | Khursheed, A., Nelliyan, K., Ding, Y. (2006-04). Nanoscale imaging with a portable field emission scanning electron microscope. Microelectronic Engineering 83 (4-9 SPEC. ISS.) : 762-766. ScholarBank@NUS Repository. https://doi.org/10.1016/j.mee.2006.01.003 | Abstract: | Secondary electron images at low landing energies (below 50 eV) are presented by a portable field emission scanning electron microscope. The results show that nanoscale images of resolution better than 20 nm can be obtained on a nylon-fibre specimen at landing energies as low as 1 eV. Preliminary simulation results predict that the image resolution should be much higher. © 2006 Elsevier B.V. All rights reserved. | Source Title: | Microelectronic Engineering | URI: | http://scholarbank.nus.edu.sg/handle/10635/56763 | ISSN: | 01679317 | DOI: | 10.1016/j.mee.2006.01.003 |
| Appears in Collections: | Staff Publications |
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