Please use this identifier to cite or link to this item: https://doi.org/10.1016/j.mee.2006.01.003
Title: Nanoscale imaging with a portable field emission scanning electron microscope
Authors: Khursheed, A. 
Nelliyan, K.
Ding, Y.
Keywords: Immersion electron lens
Landing energy
SEM
Issue Date: Apr-2006
Source: Khursheed, A., Nelliyan, K., Ding, Y. (2006-04). Nanoscale imaging with a portable field emission scanning electron microscope. Microelectronic Engineering 83 (4-9 SPEC. ISS.) : 762-766. ScholarBank@NUS Repository. https://doi.org/10.1016/j.mee.2006.01.003
Abstract: Secondary electron images at low landing energies (below 50 eV) are presented by a portable field emission scanning electron microscope. The results show that nanoscale images of resolution better than 20 nm can be obtained on a nylon-fibre specimen at landing energies as low as 1 eV. Preliminary simulation results predict that the image resolution should be much higher. © 2006 Elsevier B.V. All rights reserved.
Source Title: Microelectronic Engineering
URI: http://scholarbank.nus.edu.sg/handle/10635/56763
ISSN: 01679317
DOI: 10.1016/j.mee.2006.01.003
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