Please use this identifier to cite or link to this item: https://doi.org/10.1063/1.1790551
Title: Microtomography and improved resolution in cathodoluminescence microscopy using confocal mirror optics
Authors: Chan, D.S.H. 
Liu, Y.Y.
Phang, J.C.H. 
Rau, E.
Sennov, R.
Gostev, A.V.
Issue Date: Oct-2004
Source: Chan, D.S.H., Liu, Y.Y., Phang, J.C.H., Rau, E., Sennov, R., Gostev, A.V. (2004-10). Microtomography and improved resolution in cathodoluminescence microscopy using confocal mirror optics. Review of Scientific Instruments 75 (10 I) : 3191-3199. ScholarBank@NUS Repository. https://doi.org/10.1063/1.1790551
Abstract: Cathodoluminescence in scanning electron microscopy observed using an ellipsoidal confocal light collector system can offer improved resolution and an implementation of microtomography. With this signal collection system, the resolution limit is no longer determined by the beam and specimen properties but by the system optics. This possibility is demonstrated by the modeling of light transport in cathodoluminescent materials and in the ellipsoidal confocal system which collects the light emission. The conditions for the high-resolution three-dimensional visualization of microstructure within the generation volume of cathodoluminescence emission is described. © 2004 American Institute of Physics.
Source Title: Review of Scientific Instruments
URI: http://scholarbank.nus.edu.sg/handle/10635/56631
ISSN: 00346748
DOI: 10.1063/1.1790551
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