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|Title:||Imaging with surface sensitive backscattered electrons|
|Authors:||Luo, T. |
|Source:||Luo, T., Khursheed, A. (2007). Imaging with surface sensitive backscattered electrons. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 25 (6) : 2017-2019. ScholarBank@NUS Repository. https://doi.org/10.1116/1.2781523|
|Abstract:||This article presents simulation and experimental results of an angle-filtered backscattered electron (BSE) technique in the scanning electron microscope (SEM). Simulation results predict that for an incident primary beam energy of 5 keV, BSEs with low emission angles (90°-91°) contain scattering information coming mostly from within 2 nm below the specimen surface. A buried layer track is tested with a 10 keV primary beam inside a normal SEM. The BSE image at low emission angles (between 90° and 91°) provides only surface contamination details while the buried layer is not present. This result indicates that the low emission angle BSEs can be used for surface sensitive imaging. © 2007 American Vacuum Society.|
|Source Title:||Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures|
|Appears in Collections:||Staff Publications|
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