Please use this identifier to cite or link to this item: https://doi.org/10.1109/LED.2011.2136311
Title: Experimental investigation of a cavity-mode resonator using a micromachined two-dimensional silicon phononic crystal in a square lattice
Authors: Wang, N.
Tsai, J.M.
Hsiao, F.-L. 
Soon, B.W.
Kwong, D.-L.
Palaniapan, M. 
Lee, C. 
Keywords: Cavity mode
CMOS compatible
phononic crystal (PnC)
resonator
Issue Date: Jun-2011
Source: Wang, N.,Tsai, J.M.,Hsiao, F.-L.,Soon, B.W.,Kwong, D.-L.,Palaniapan, M.,Lee, C. (2011-06). Experimental investigation of a cavity-mode resonator using a micromachined two-dimensional silicon phononic crystal in a square lattice. IEEE Electron Device Letters 32 (6) : 821-823. ScholarBank@NUS Repository. https://doi.org/10.1109/LED.2011.2136311
Abstract: A 2-D silicon phononic crystal (PnC) slab of a square array of cylindrical air holes in a 10- μm-thick freestanding silicon plate with line defects is characterized as a cavity-mode PnC resonator. A piezoelectric aluminum nitride (AlN) film is employed as the interdigital transducers to transmit and detect acoustic waves, thus making the whole microfabrication process CMOS compatible. Both the band structure of the PnC and the transmission spectrum of the proposed PnC resonator are analyzed and optimized using finite-element method. The measured quality factor (Q factor) of the microfabricated PnC resonator is over 1000 at its resonant frequency of 152.46 MHz. The proposed PnC resonator shows promising acoustic resonance characteristics for radio-frequency communications and sensing applications. © 2011 IEEE.
Source Title: IEEE Electron Device Letters
URI: http://scholarbank.nus.edu.sg/handle/10635/55960
ISSN: 07413106
DOI: 10.1109/LED.2011.2136311
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