Please use this identifier to cite or link to this item: https://doi.org/10.1364/JOSAA.28.000903
Title: Effect of polarization on a solid immersion lens of arbitrary thickness
Authors: Lim, K.M.
Lee, G.C.F.
Sheppard, C.J.R. 
Phang, J.C.H. 
Wong, C.L.
Chen, X. 
Issue Date: May-2011
Source: Lim, K.M.,Lee, G.C.F.,Sheppard, C.J.R.,Phang, J.C.H.,Wong, C.L.,Chen, X. (2011-05). Effect of polarization on a solid immersion lens of arbitrary thickness. Journal of the Optical Society of America A: Optics and Image Science, and Vision 28 (5) : 903-911. ScholarBank@NUS Repository. https://doi.org/10.1364/JOSAA.28.000903
Abstract: A solid immersion lens can be applied for high-resolution subsurface analysis of integrated circuits and other physical systems. We present a thorough analysis of the focal field distribution of a solid immersion lens system of arbitrary thickness. Cases of linearly and radially polarized illumination are examined and accurate expressions derived for the electric field in the image space. The effect of the spherical interface on both transverse and axial intensity profiles is analyzed. The performance and practicality of configurations deviating from the hemispherical and aplanatic cases are studied. The results show that optimal resolution is obtained at focal positions between the hemispherical and aplanatic points when radially polarized illumination is applied. © 2011 Optical Society of America.
Source Title: Journal of the Optical Society of America A: Optics and Image Science, and Vision
URI: http://scholarbank.nus.edu.sg/handle/10635/55755
ISSN: 10847529
DOI: 10.1364/JOSAA.28.000903
Appears in Collections:Staff Publications

Show full item record
Files in This Item:
There are no files associated with this item.

SCOPUSTM   
Citations

10
checked on Dec 12, 2017

Page view(s)

40
checked on Dec 14, 2017

Google ScholarTM

Check

Altmetric


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.