Please use this identifier to cite or link to this item: https://doi.org/10.1116/1.2062432
Title: Dynamic chromatic aberration correction in low energy electron microscopes
Authors: Khursheed, A. 
Issue Date: Nov-2005
Source: Khursheed, A. (2005-11). Dynamic chromatic aberration correction in low energy electron microscopes. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 23 (6) : 2749-2753. ScholarBank@NUS Repository. https://doi.org/10.1116/1.2062432
Abstract: This paper presents a method of dynamically correcting for the chromatic aberration in pulsed gun low energy electron microscope systems. The proposal is based upon the use of a drift tube in combination with electron lenses whose focal strengths can be rapidly modulated. Simulation results that use direct ray tracing of electrons are presented for specific drift tube/correction lens combinations. © 2005 American Vacuum Society.
Source Title: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
URI: http://scholarbank.nus.edu.sg/handle/10635/55716
ISSN: 10711023
DOI: 10.1116/1.2062432
Appears in Collections:Staff Publications

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