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https://doi.org/10.1116/1.2062432
Title: | Dynamic chromatic aberration correction in low energy electron microscopes | Authors: | Khursheed, A. | Issue Date: | Nov-2005 | Citation: | Khursheed, A. (2005-11). Dynamic chromatic aberration correction in low energy electron microscopes. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 23 (6) : 2749-2753. ScholarBank@NUS Repository. https://doi.org/10.1116/1.2062432 | Abstract: | This paper presents a method of dynamically correcting for the chromatic aberration in pulsed gun low energy electron microscope systems. The proposal is based upon the use of a drift tube in combination with electron lenses whose focal strengths can be rapidly modulated. Simulation results that use direct ray tracing of electrons are presented for specific drift tube/correction lens combinations. © 2005 American Vacuum Society. | Source Title: | Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures | URI: | http://scholarbank.nus.edu.sg/handle/10635/55716 | ISSN: | 10711023 | DOI: | 10.1116/1.2062432 |
Appears in Collections: | Staff Publications |
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