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|Title:||Dynamic chromatic aberration correction in low energy electron microscopes|
|Citation:||Khursheed, A. (2005-11). Dynamic chromatic aberration correction in low energy electron microscopes. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 23 (6) : 2749-2753. ScholarBank@NUS Repository. https://doi.org/10.1116/1.2062432|
|Abstract:||This paper presents a method of dynamically correcting for the chromatic aberration in pulsed gun low energy electron microscope systems. The proposal is based upon the use of a drift tube in combination with electron lenses whose focal strengths can be rapidly modulated. Simulation results that use direct ray tracing of electrons are presented for specific drift tube/correction lens combinations. © 2005 American Vacuum Society.|
|Source Title:||Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures|
|Appears in Collections:||Staff Publications|
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