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Title: Development of electrothermal actuation based planar variable optical attenuators (VOAs)
Authors: Lee, C. 
Andrew Yeh, J.
Issue Date: 1-Apr-2006
Citation: Lee, C., Andrew Yeh, J. (2006-04-01). Development of electrothermal actuation based planar variable optical attenuators (VOAs). Journal of Physics: Conference Series 34 (1) : 1026-1031. ScholarBank@NUS Repository.
Abstract: Several sorts of MEMS (Microelectromechanical Systems) based have been demonstrated by using electrostatic actuation scheme up to date. The comb drive and parallel plate are the two most common electrostatic actuators that have been well studied in variable optical attenuator (VOA) applications. In addition to the known retro-reflection type of optical attenuation being realized by our new devices driven by electrothermal actuators in present study, a novel planar tilted mirror with rotational and translation moving capability is proposed by using electrothermal actuators as well. Using electrothermal actuators to provide said planar tilted mirror with rotational and translational displacement has granted us a more efficient way to perform the light attenuation for in-plane structure. The static and transient characteristics of devices operated at ambient room temperature environment show good repeatability and stability. © 2006 IOP Publishing Ltd.
Source Title: Journal of Physics: Conference Series
ISSN: 17426588
DOI: 10.1088/1742-6596/34/1/170
Appears in Collections:Staff Publications

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