Please use this identifier to cite or link to this item: https://doi.org/10.1016/j.ultramic.2013.01.001
Title: Design of a focused electron beam column for ring-cathode sources
Authors: Khursheed, A. 
Keywords: Cold field emitter single-tip gun
Focused electron beam
Nano-emitter array
Objective lens
Ring-cathodes
Virtual source
Issue Date: May-2013
Source: Khursheed, A. (2013-05). Design of a focused electron beam column for ring-cathode sources. Ultramicroscopy 128 : 10-23. ScholarBank@NUS Repository. https://doi.org/10.1016/j.ultramic.2013.01.001
Abstract: This paper describes focused electron beam columns designed for ring-cathode sources. Each cathode is intended to have a nano-size ring-edge thickness (typically around 50. nm), while its radius can measure hundreds of microns or larger, providing an area of emission that is several orders of magnitude greater than that of conventional field emission cathodes. Using methods of first-order and second-order geometric aberration correction, direct ray tracing simulations predict that these columns will be capable of combining high probe current (>1. μA) with high spatial resolution (<20. nm). Several simple column designs consisting of a ring-cathode gun unit combined with either a single magnetic or electric objective lens are presented. The ring-cathode concept is applicable to both field emission and photo-cathode guns. © 2013 Elsevier B.V..
Source Title: Ultramicroscopy
URI: http://scholarbank.nus.edu.sg/handle/10635/55563
ISSN: 03043991
DOI: 10.1016/j.ultramic.2013.01.001
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