Please use this identifier to cite or link to this item: https://doi.org/10.1063/1.4810900
Title: Analysis of intrinsic hydrogenated amorphous silicon passivation layer growth for use in heterojunction silicon wafer solar cells by optical emission spectroscopy
Authors: Ge, J.
Ling, Z.P.
Wong, J.
Stangl, R.
Aberle, A.G. 
Mueller, T.
Issue Date: 21-Jun-2013
Source: Ge, J., Ling, Z.P., Wong, J., Stangl, R., Aberle, A.G., Mueller, T. (2013-06-21). Analysis of intrinsic hydrogenated amorphous silicon passivation layer growth for use in heterojunction silicon wafer solar cells by optical emission spectroscopy. Journal of Applied Physics 113 (23) : -. ScholarBank@NUS Repository. https://doi.org/10.1063/1.4810900
Abstract: The structure and quality of intrinsic hydrogenated amorphous silicon thin films are studied with intended use as passivation layer in heterojunction silicon wafer solar cells. The thin film layers are formed by radio-frequency parallel-plate plasma-enhanced chemical vapor deposition. While the passivation quality of the films is found to improve steadily with increasing deposition temperature, a very narrow process window in terms of pressure variation is observed. The best effective lifetime is obtained at a hydrogen to silane dilution ratio of 1 and a pressure of 66.7 Pa for the used tool configuration. Raman crystallinity and Urbach energy obtained from fitting ellipsometry data confirm that the degradation of the passivation quality outside the process window is due to a phase change into microcrystalline silicon with different growth mechanisms and an increase in bonding related defects. Film growth mechanisms are proposed to account for the observed narrow process window, which are verified by optical emission spectroscopy measurements. © 2013 AIP Publishing LLC.
Source Title: Journal of Applied Physics
URI: http://scholarbank.nus.edu.sg/handle/10635/55083
ISSN: 00218979
DOI: 10.1063/1.4810900
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