Please use this identifier to cite or link to this item: https://doi.org/2/025023
Title: A micromachined stationary lamellar grating interferometer for Fourier transform spectroscopy
Authors: Chau, F.S. 
Du, Y. 
Zhou, G. 
Issue Date: 1-Feb-2008
Source: Chau, F.S.,Du, Y.,Zhou, G. (2008-02-01). A micromachined stationary lamellar grating interferometer for Fourier transform spectroscopy. Journal of Micromechanics and Microengineering 18 (2) : -. ScholarBank@NUS Repository. https://doi.org/2/025023
Abstract: This paper reports a novel micromachined stationary lamellar grating interferometer for Fourier transform (FT) based spectroscopy applications. The interferometer employs a set of tilted interdigitated light reflecting beams to produce an interferogram with spatially varying optical path difference (OPD) recorded by a line photodetector array. Due to the advantages including robustness and the absence of mechanical moving parts and optical beam splitters, the proposed spectrometer may be built in a relatively small volume and with moderate cost for wide-band radiation spectra measurement, fast time-resolved spectroscopy and for field use. The proposed stationary lamellar grating FT spectrometer was implemented using a silicon-on-insulator (SOI) micromachining process. The prototype spectrometer demonstrated a full width at half maximum (FWHM) spectral resolution of 2 nm at a wavelength of 532 nm and of 2.6 nm at 632.8 nm. © 2008 IOP Publishing Ltd.
Source Title: Journal of Micromechanics and Microengineering
URI: http://scholarbank.nus.edu.sg/handle/10635/54383
ISSN: 09601317
DOI: 2/025023
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