A direct and accurate method for the extraction of diffusion length and surface recombination velocity from an EBIC line scan

Abstract

A new method is proposed for the determination of bulk minority carrier diffusion length and surface recombination velocity. This method uses data from an EBIC line scan in which the current collecting p -n junction or Schottky barrier is parallel to the electron beam. A 3-D computer simulation was used to verify the accuracy of the method. It was found that this method is simpler to use and more accurate than existing methods.