Role of deposition magnetic field on magnetic properties and their unusual thermal behaviors of FeCoZr films prepared by gradient composition sputtering

Abstract

We report our systematic investigation of the temperature-dependent microwave properties of FeCoZr fabricated by gradient-composition sputtering technique with regards to the variation of the Zr deposition power with and without magnetic field applied during deposition. Specifically, we show that the films fabricated by this special method may have a peculiar thermal behavior whereby the magnetic anisotropy is increased with temperature if the induced magnetic anisotropy is sufficiently large. Moreover, our study reveals that the magnetic field applied during deposition process plays a vital role for the increment of the stress-induced magnetic anisotropy, which is useful for enhancing the resonance frequency as well as its thermal stability. © 2013 AIP Publishing LLC.