Library-based performance-based OPC

Abstract

Conventional geometrical EPE-based OPC approach often results in complicated mask and requires expensive computational effort. To address the mask complexity issue, a device performance-based OPC (DPB-OPC) algorithm which operates based on parametric current, rather than desired layout pattern as in conventional OPC, has been proposed to achieve considerable mask data saving. However, the performance gain is currently limited by the comparatively longer run-time. To improve run-time efficiency of the previous work, we present a library-based DPBOPC methodology in the paper. In particular, cell-wise OPC concept is deployed to explore its merit of run-time saving. To counteract the performance degradation shift that caused by different surrounding environment, a localized DPBOPC refinement can be selectively performed. When compared to full chip OPC, substantial run-time reduction is achieved in the benchmark design. © 2010 Copyright SPIE - The International Society for Optical Engineering.