Please use this identifier to cite or link to this item: https://doi.org/10.1016/S0168-583X(99)00376-6
Title: Investigation of light emitting diodes using nuclear microprobes
Authors: Yang, C. 
Bettiol, A.
Jamieson, D.
Hua, X.
Phang, J.C.H. 
Chan, D.S.H. 
Watt, F. 
Osipowicz, T. 
Issue Date: 2-Sep-1999
Source: Yang, C., Bettiol, A., Jamieson, D., Hua, X., Phang, J.C.H., Chan, D.S.H., Watt, F., Osipowicz, T. (1999-09-02). Investigation of light emitting diodes using nuclear microprobes. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 158 (1) : 481-486. ScholarBank@NUS Repository. https://doi.org/10.1016/S0168-583X(99)00376-6
Abstract: The quality of semiconductor p-n junctions and substrates is essential for a reliable performance of microelectronic devices. The imaging techniques of ion beam induced charge (IBIC) and ionoluminescence (IL) are applied to image and analyze light emitting diodes (LEDs). The LEDs have been imaged both from the front (beam normal to p-n junction plane) and from the transverse direction (beam parallel to p-n junction plane). The imaging techniques provide details on the structural uniformity of the p-n junction and the light emitting properties, as stimulated by proton irradiation. Following IBIC and IL analysis, PIXE and RBS provide elemental distribution information on the metal layers and other components in the LEDs. The techniques which can be utilized by the nuclear microprobe potentially provide powerful tools for the failure analysis and quality control of the fabrication of microelectronic devices.
Source Title: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
URI: http://scholarbank.nus.edu.sg/handle/10635/50573
ISSN: 0168583X
DOI: 10.1016/S0168-583X(99)00376-6
Appears in Collections:Staff Publications

Show full item record
Files in This Item:
There are no files associated with this item.

SCOPUSTM   
Citations

4
checked on Dec 13, 2017

WEB OF SCIENCETM
Citations

4
checked on Nov 16, 2017

Page view(s)

37
checked on Dec 9, 2017

Google ScholarTM

Check

Altmetric


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.