Please use this identifier to cite or link to this item: https://doi.org/10.1007/s003390050955
Title: Amorphous hydrogenated carbon synthesized by pulsed laser deposition from cyclohexane
Authors: Lu, Y.F. 
Huang, S.M.
Huan, C.H.A. 
Luo, X.F.
Issue Date: Jun-1999
Citation: Lu, Y.F., Huang, S.M., Huan, C.H.A., Luo, X.F. (1999-06). Amorphous hydrogenated carbon synthesized by pulsed laser deposition from cyclohexane. Applied Physics A: Materials Science and Processing 68 (6) : 647-651. ScholarBank@NUS Repository. https://doi.org/10.1007/s003390050955
Abstract: It is demonstrated that a liquid hydrocarbon precursor, cyclohexane, is appropriate for laser-induced carbon deposition. Amorphous hydrogenated carbon films (a-C:H) were deposited by KrF excimer laser irradiation of single-crystal silicon surface immersed under cyclohexane. The technique is simple and easy to operate. IR absorption spectra of the deposited films confirmed the presence of carbon in the diamond phase. Raman and XPS studies showed diamond-like character of the deposited films. Moreover, these two studies provided strong evidence that laser fluence played an important role in the formation of DLC bondings and the quality of the deposited films.
Source Title: Applied Physics A: Materials Science and Processing
URI: http://scholarbank.nus.edu.sg/handle/10635/50527
ISSN: 09478396
DOI: 10.1007/s003390050955
Appears in Collections:Staff Publications

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