Novel Actuation Mechanisms for MEMS Mirrors

Abstract

Recent developments in the rapidly emerging discipline of micro-electro-mechanical systems (MEMS) have shown special promise in sensors, actuators, and micro-optical systems. In fact, optics is an ideal application domain for MEMS technology as photons have no mass and are easier to be actuated compared with other microscale objects. In conjunction with properly designed mirrors, lenses and gratings, various micro-optical systems driven by microactuators can be made to perform many different functions of light manipulations such as reflection, beam steering, filtering, and collimating, etc.

In this thesis, various MEMS mirror designs for two-dimensional (2-D) scanning and variable optical attenuator (VOA) applications are explored. Four unique designs based on piezoelectric and hybrid actuation mechanisms have been conceptualized. With the focus on the development of novel actuation mechanisms to drive the MEMS mirrors, characterization of these designs have been made from the perspective of the aforementioned applications.