Please use this identifier to cite or link to this item: http://scholarbank.nus.edu.sg/handle/10635/34937
Title: Patterned ferroelectric thin films for microwave devices
Authors: ONG, CHONG KIM 
TAN, CHIN YAW 
Issue Date: 14-Sep-2006
Source: ONG, CHONG KIM,TAN, CHIN YAW (2006-09-14). Patterned ferroelectric thin films for microwave devices. ScholarBank@NUS Repository.
Abstract: A process, for patterning a thin film that is highly resistant to conventional etching processes and that is to be deposited at a high substrate temperature, is disclosed. The process uses a liftoff method wherein a refractory material has been substituted for the conventional organic resin. The method is particularly useful for the fabrication of tunable microwave devices and ferroelectric memory elements.
URI: http://scholarbank.nus.edu.sg/handle/10635/34937
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