Please use this identifier to cite or link to this item: http://scholarbank.nus.edu.sg/handle/10635/32794
Title: Multi-beam ion/electron spectra-microscope
Authors: KHURSHEED, ANJAM 
Issue Date: 24-May-2011
Source: KHURSHEED, ANJAM (2011-05-24). Multi-beam ion/electron spectra-microscope. ScholarBank@NUS Repository.
Abstract: This invention is a multi-beam charged particle instrument that can simultaneously focus electrons and a variety of positive and negative ions, such as Gallium, Oxygen and Cesium ions, onto the same material target. In addition, the instrument has provision to simultaneously capture the spectrum of both secondary electrons and ions. The highly dispersive, high resolution mass spectrometer portion of the instrument is expected to detect and identify secondary ion species across the entire range of the periodic table, and also record a portion of their emitted energy spectrum. The electron energy spectrometer part of the instrument is designed to acquire the entire range of scattered electrons, from the low energy secondary electrons through to the elastic backscattered electrons.
URI: http://scholarbank.nus.edu.sg/handle/10635/32794
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