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https://scholarbank.nus.edu.sg/handle/10635/32771
| Title: | Capacitive pressure sensor with a cantilever member | Authors: | TAN, WOEI WAN GE, PEI TAY, ENG HOCK FRANCIS PHANG, JYH SIONG |
Issue Date: | 20-Jan-2009 | Citation: | TAN, WOEI WAN,GE, PEI,TAY, ENG HOCK FRANCIS,PHANG, JYH SIONG (2009-01-20). Capacitive pressure sensor with a cantilever member. ScholarBank@NUS Repository. | Abstract: | A capacitive pressure sensing device comprising, a base member, a diaphragm member deflectable under an external pressure, a cantilever member disposed between the base member and the diaphragm member and supported on a support structure, wherein the base member and the cantilever member form a capacitor structure of the device and wherein deflection of the diaphragm member beyond a threshold value causes the cantilever member to deflect to cause a capacitive change in the capacitor structure. | URI: | http://scholarbank.nus.edu.sg/handle/10635/32771 |
| Appears in Collections: | Staff Publications |
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| US7478559.PDF | 393.08 kB | Adobe PDF | OPEN | Published | View/Download |
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