Please use this identifier to cite or link to this item: http://scholarbank.nus.edu.sg/handle/10635/32771
Title: Capacitive pressure sensor with a cantilever member
Authors: TAN, WOEI WAN 
GE, PEI
TAY, ENG HOCK FRANCIS 
PHANG, JYH SIONG 
Issue Date: 20-Jan-2009
Source: TAN, WOEI WAN,GE, PEI,TAY, ENG HOCK FRANCIS,PHANG, JYH SIONG (2009-01-20). Capacitive pressure sensor with a cantilever member. ScholarBank@NUS Repository.
Abstract: A capacitive pressure sensing device comprising, a base member, a diaphragm member deflectable under an external pressure, a cantilever member disposed between the base member and the diaphragm member and supported on a support structure, wherein the base member and the cantilever member form a capacitor structure of the device and wherein deflection of the diaphragm member beyond a threshold value causes the cantilever member to deflect to cause a capacitive change in the capacitor structure.
URI: http://scholarbank.nus.edu.sg/handle/10635/32771
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