Please use this identifier to cite or link to this item: http://scholarbank.nus.edu.sg/handle/10635/32545
Title: Retractable cathodoluminescence detector with high ellipticity and high backscattered electron rejection performance for large area specimens
Authors: PHANG, J. C. H. 
CBIM, W. K. 
CHAN, D. S. H. 
LIU, Y. Y. 
Issue Date: 29-Oct-1996
Source: PHANG, J. C. H.,CBIM, W. K.,CHAN, D. S. H.,LIU, Y. Y. (1996-10-29). Retractable cathodoluminescence detector with high ellipticity and high backscattered electron rejection performance for large area specimens. ScholarBank@NUS Repository.
Abstract: A cathodoluminescence detection system including a semi-ellipsoidal mirror of high ellipticity, with the mirror constructed of material of low atomic number to minimize interference caused by backscattered electrons. An emission radiation guide is mounted in line with the axis of rotation of the mirror to optimize CL radiation collection. Low detector height provides high spatial resolution in electron beam systems.
URI: http://scholarbank.nus.edu.sg/handle/10635/32545
Appears in Collections:Staff Publications

Show full item record
Files in This Item:
File Description SizeFormatAccess SettingsVersion 
US5569920.PDF165.4 kBAdobe PDF

OPEN

PublishedView/Download

Page view(s)

136
checked on Jan 19, 2018

Download(s)

103
checked on Jan 19, 2018

Google ScholarTM

Check


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.