Please use this identifier to cite or link to this item:
https://scholarbank.nus.edu.sg/handle/10635/32545
| Title: | Retractable cathodoluminescence detector with high ellipticity and high backscattered electron rejection performance for large area specimens | Authors: | PHANG, J. C. H. CBIM, W. K. CHAN, D. S. H. LIU, Y. Y. |
Issue Date: | 29-Oct-1996 | Citation: | PHANG, J. C. H.,CBIM, W. K.,CHAN, D. S. H.,LIU, Y. Y. (1996-10-29). Retractable cathodoluminescence detector with high ellipticity and high backscattered electron rejection performance for large area specimens. ScholarBank@NUS Repository. | Abstract: | A cathodoluminescence detection system including a semi-ellipsoidal mirror of high ellipticity, with the mirror constructed of material of low atomic number to minimize interference caused by backscattered electrons. An emission radiation guide is mounted in line with the axis of rotation of the mirror to optimize CL radiation collection. Low detector height provides high spatial resolution in electron beam systems. | URI: | http://scholarbank.nus.edu.sg/handle/10635/32545 |
| Appears in Collections: | Staff Publications |
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| US5569920.PDF | 165.4 kB | Adobe PDF | OPEN | Published | View/Download |
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