Study of FeTaN Films and FeTaN Lamination stack using microwave techniques.

Abstract

Patterning method was utilized to improve the resonance frequency of nanocrystalline FeTaN thin film. The magnetic properties and microwave response of the patterned strip arrays were investigated with different strip widths and patterning directions.We also deposit FeTaN thin films on flexible insulator polymer substrates and glue them together to form a composite material consisting of ferromagnetic films laminated with insulating polymer sheets. The fabrication of this kind of soft magnetic lamination stacks makes them a good candidate for high-frequency microwave device applications. For the design of a microwave device, the complex permeability is quite critical so we have to develop microstrip line method, and apply these methods to measure the scattering parameters of the FeTaN lamination stack. Permeability spectra of the FeTaN lamination stack are obtained by transmission line model. The result is examined by the full wave electromagnetic analysis combined with an optimization procedure using commercial HFSS software.