Model order reduction techniques in microelectromechanics

Abstract

In this thesis, reduced-order models or macromodels based on the global admissible trial functions and the principle of minimum potential energy have been developed for quasi-static simulation of the MEMS devices and systems. For dynamic simulation of simple structure MEMS devices and systems, model order reduction methods based on proper orthogonal decomposition (POD), including Karhunen-Lo??ve decomposition (KLD), principal component analysis (PCA), and the Galerkin procedure for generating macromodels that accurately capture the MEMS behaviours have been presented. A novel model order reduction technique for macromodels generation using KLD and classical component mode synthesis (CMS) for the dynamic simulation of the structurally complex MEMS devices has also been developed. Numerical studies demonstrate that it is efficient to divide the structurally complex MEMS devices into substructures or components to obtain the Karhunen-Lo??ve modes (KLMs) as a??component modesa?? for each individual component in the modal decomposition process, and use the CMS to generate the macromodels.