Please use this identifier to cite or link to this item: http://scholarbank.nus.edu.sg/handle/10635/14472
Title: Synthesis of ultra thin free-standing through-hole anodic alumina membrane and its applications
Authors: CHEN ZHONG
Keywords: anodic alumina membrane, MIS, anodization, CNT, nanodots, alumina template
Issue Date: 28-Feb-2005
Source: CHEN ZHONG (2005-02-28). Synthesis of ultra thin free-standing through-hole anodic alumina membrane and its applications. ScholarBank@NUS Repository.
Abstract: This thesis deals with the aluminum (Al) anodization, fabrication of porous anodic alumina membrane (AAM) and its application in metal-insulator-semiconductor (MOS) memory device with germanium (Ge) nanodots embedded in a silicon dioxide matrix.Two methods were proposed to fabricate the AAM template. One of them is to anodize Al layer evaporated on silicon (Si) substrate. The other method is to first anodize the Al foil and then separate the AAM formed on Al foil. The AAM was attached to Si substrate and act as an evaporation mask in the fabrication of Ge nanodots. The Ge nanodots were embedded into oxide matrix in MOS tri-layer structure. The capacitance versus voltage (C-V) characteristics show a memory effect in this tri-layer structure.We had successfully fabricated ultra-thin free-standing through-hole porous AAM on Si substrate. The pore diameter and aspect ratio of AAM are tunable. These advantages make the ultra-thin AAM suitable incorporate into other nanoscale devices or structures.
URI: http://scholarbank.nus.edu.sg/handle/10635/14472
Appears in Collections:Master's Theses (Open)

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Title page.pdf6.34 kBAdobe PDF

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Acknowledgements.pdf15.13 kBAdobe PDF

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Table of Contents.pdf37.8 kBAdobe PDF

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Abstract.pdf10.78 kBAdobe PDF

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List of Figures.pdf58.93 kBAdobe PDF

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Chapter I Introduction.pdf41.01 kBAdobe PDF

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Chapter II Literature Review.pdf931.79 kBAdobe PDF

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Chapter III Experiment Setup and Analytical Techniques.pdf213.75 kBAdobe PDF

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Chapter IV Fabrication of Anodic Alumina Membrane.pdf7.51 MBAdobe PDF

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Chapter V Applications of Ultra Thin Free-standing Through-hole AAM.pdf7.08 MBAdobe PDF

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Chapter VI Conclusion.pdf17.17 kBAdobe PDF

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Reference.pdf81.44 kBAdobe PDF

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