Please use this identifier to cite or link to this item: http://scholarbank.nus.edu.sg/handle/10635/143296
Title: GRAPHENE NANOSTUCTURING WITH THE HELIUM ION MICROSCOPE
Authors: WANG YUE
Keywords: graphene, nanofabrication, helium ion beam, atomic hydrogen etching, backscattered-ion-induced damage,device fabrication
Issue Date: 28-Dec-2015
Citation: WANG YUE (2015-12-28). GRAPHENE NANOSTUCTURING WITH THE HELIUM ION MICROSCOPE. ScholarBank@NUS Repository.
Abstract: NANO-ENGINEERING OF GRAPHENE HAS ATTRACTED TREMENDOUS INTEREST FOR GRAPHENE?S POTENTIAL APPLICATIONS. HOWEVER, THE CONVENTIONAL FABRICATION TECHNIQUES, ARE EITHER LIMITED BY THE LITHOGRAPHIC RESOLUTION OR LIMITED TO FIXED GEOMETRIES. OUR GROUP HAS DEMONSTRATED A RESIST-FREE DIRECT PATTERNING METHOD TO MAKE SUB-10-NM ARBITRARY FEATURES ON GRAPHENE USING FOCUSED-HELIUM-ION-BEAM ON BOTH SUPPORTED AND SUSPENDED GRAPHENE FLAKES. HOWEVER, THIS METHOD REQUIRES A HIGH FLUENCE OF INCIDENT HELIUM IONS WHICH CAUSES SIGNIFICANT DAMAGE TO THE GRAPHENE DUE TO THE BACKSCATTERED IONS, AND WILL DEGRADE THE PROPERTIES OF THE NANOSCALE-PATTERED GRAPHENE. BY LOCALLY DAMAGING GRAPHENE USING A RELATIVELY LOWER HELIUM ION DOSE INSTEAD OF DIRECT SPUTTERING, WE CAN UTILIZE THE DIFFERENTIAL ETCHING OF ATOMIC-HYDROGEN TO SELECTIVELY REMOVE THE DAMAGED AREA TO FABRICATE ARBITRARY NANOSCALE FEATURES ON GRAPHENE, WHILE MITIGATING THE BACKSCATTERED-ION-INDUCED DAMAGE. RAMAN CHARACTERIZATION SHOWS NO DAMAGE IS CAU
URI: http://scholarbank.nus.edu.sg/handle/10635/143296
Appears in Collections:Ph.D Theses (Open)

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