Modelling and simulation of MEMS gyroscope

Abstract

Micromachined gyroscopes have received much attention for their small dimensions, low cost, low power consumption and yet possible high sensitivity. In this thesis, the modelling and simulation of the vibratory rate MEMS gyroscope and the critical phenomena on quadrature movement are presented. At first, modelling of the driving and sensing structures of the gyroscope are proposed and verified by the commercial finite element software IntelliSuite. Based on the models developed, the gyroscope and the quadrature error due to unbalanced comb drive are then simulated by the numerical tool of SPICE. On the other hand, in order to improve the sensitivity, a new driving scheme is proposed to enhance the linear momentum of the gyroscope. Experiments for the MUMPS gyroscope are done to verify the theoretical predictions, and good agreements between the theory and experimental results are obtained.