Fabrication, characterization and analysis of carbon nanotube based nanoelectromechanical system

Abstract

Since the discovery in 1991, the extraordinary mechanical and electrical properties have made carbon nanotubes (CNTs) ideal components of nanodevices for the purpose of emerging ultrasensitive applications. Synthesis of catalytic CVD grown multiwalled carbon nanotubes (MWNTs) and fabrication of CNT sensors are described first in this thesis. The feasibility and capability of using catalytic CVD grown MWNTs as ultrasensitive mass sensor which exhibit attogram mass sensitivity are investigated and evaluated. This attogram-sensing capability enables CNT resonatorb s potentially versatile utilization in various emerging fields and CNT resonator the promising candidate for novel sensing applications to meet the ever-increasingly high-performance requirement.