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https://doi.org/10.1016/j.physleta.2014.12.007
| Title: | X-ray lithography of SU8 photoresist using fast miniature plasma focus device and its characterization using FTIR spectroscopy | Authors: | Kalaiselvi, Shenbaga M. P. Tan, Augustine Tuck Lee Talebitaher, Alireza R. Lee, Paul Heussler, Sascha Pierre Breese, Mark Brian H. Rawat, Rajdeepsingh |
Issue Date: | 2015 | Publisher: | Elsevier | Citation: | Kalaiselvi, Shenbaga M. P., Tan, Augustine Tuck Lee, Talebitaher, Alireza R., Lee, Paul, Heussler, Sascha Pierre, Breese, Mark Brian H., Rawat, Rajdeepsingh (2015). X-ray lithography of SU8 photoresist using fast miniature plasma focus device and its characterization using FTIR spectroscopy. Physics Letters, Section A: General, Atomic and Solid State Physics 379 (6) : 560-569. ScholarBank@NUS Repository. https://doi.org/10.1016/j.physleta.2014.12.007 | Source Title: | Physics Letters, Section A: General, Atomic and Solid State Physics | URI: | http://scholarbank.nus.edu.sg/handle/10635/123571 | ISSN: | 03759601 | DOI: | 10.1016/j.physleta.2014.12.007 |
| Appears in Collections: | Staff Publications |
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