Please use this identifier to cite or link to this item: https://doi.org/10.1016/j.physleta.2014.12.007
Title: X-ray lithography of SU8 photoresist using fast miniature plasma focus device and its characterization using FTIR spectroscopy
Authors: Kalaiselvi, Shenbaga M. P.
Tan, Augustine Tuck Lee
Talebitaher, Alireza R.
Lee, Paul
Heussler, Sascha Pierre 
Breese, Mark Brian H. 
Rawat, Rajdeepsingh
Issue Date: 2015
Publisher: Elsevier
Citation: Kalaiselvi, Shenbaga M. P., Tan, Augustine Tuck Lee, Talebitaher, Alireza R., Lee, Paul, Heussler, Sascha Pierre, Breese, Mark Brian H., Rawat, Rajdeepsingh (2015). X-ray lithography of SU8 photoresist using fast miniature plasma focus device and its characterization using FTIR spectroscopy. Physics Letters, Section A: General, Atomic and Solid State Physics 379 (6) : 560-569. ScholarBank@NUS Repository. https://doi.org/10.1016/j.physleta.2014.12.007
Source Title: Physics Letters, Section A: General, Atomic and Solid State Physics
URI: http://scholarbank.nus.edu.sg/handle/10635/123571
ISSN: 03759601
DOI: 10.1016/j.physleta.2014.12.007
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