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|Title:||Substrate temperature studies of SrBi2(Ta1-xNbx)2O9 grown by pulsed laser ablation deposition|
|Citation:||Tay, S.T., Huan, C.H.A., Wee, A.T.S., Liu, R., Goh, W.C., Ong, C.K., Chen, G.S. (2002-01). Substrate temperature studies of SrBi2(Ta1-xNbx)2O9 grown by pulsed laser ablation deposition. Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films 20 (1) : 125-131. ScholarBank@NUS Repository. https://doi.org/10.1116/1.1426364|
|Abstract:||SrBi2(Ta1-xNbx)2O 9 thin films were deposited on Pt/TiOx/SiO2/Si substrates by pulsed laser ablation deposition. Film properties were determined by using x-ray diffraction (XRD), x-ray photoelectron spectroscopy (XPS), atomic force microscopy (AFM), and secondary ion mass spectrometry (SIMS).|
|Source Title:||Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films|
|Appears in Collections:||Staff Publications|
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