Please use this identifier to cite or link to this item: https://doi.org/10.1116/1.1426364
Title: Substrate temperature studies of SrBi2(Ta1-xNbx)2O9 grown by pulsed laser ablation deposition
Authors: Tay, S.T.
Huan, C.H.A. 
Wee, A.T.S. 
Liu, R. 
Goh, W.C. 
Ong, C.K. 
Chen, G.S.
Issue Date: Jan-2002
Citation: Tay, S.T., Huan, C.H.A., Wee, A.T.S., Liu, R., Goh, W.C., Ong, C.K., Chen, G.S. (2002-01). Substrate temperature studies of SrBi2(Ta1-xNbx)2O9 grown by pulsed laser ablation deposition. Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films 20 (1) : 125-131. ScholarBank@NUS Repository. https://doi.org/10.1116/1.1426364
Abstract: SrBi2(Ta1-xNbx)2O 9 thin films were deposited on Pt/TiOx/SiO2/Si substrates by pulsed laser ablation deposition. Film properties were determined by using x-ray diffraction (XRD), x-ray photoelectron spectroscopy (XPS), atomic force microscopy (AFM), and secondary ion mass spectrometry (SIMS).
Source Title: Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films
URI: http://scholarbank.nus.edu.sg/handle/10635/113106
ISSN: 07342101
DOI: 10.1116/1.1426364
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