Please use this identifier to cite or link to this item: https://doi.org/10.1063/1.1448893
Title: Dependence of pulsed-laser deposition parameters on the microstructure and magnetic property of Nd-Fe-B thin films grown at high substrate temperature
Authors: Huang, X.J.
Xu, S.Y. 
Ong, C.K. 
Yang, Z.
Si, L. 
Li, Y. 
Issue Date: 1-Apr-2002
Citation: Huang, X.J., Xu, S.Y., Ong, C.K., Yang, Z., Si, L., Li, Y. (2002-04-01). Dependence of pulsed-laser deposition parameters on the microstructure and magnetic property of Nd-Fe-B thin films grown at high substrate temperature. Journal of Applied Physics 91 (7) : 4666-4671. ScholarBank@NUS Repository. https://doi.org/10.1063/1.1448893
Abstract: We systematically studied the dependencies of substrate temperature, laser fluence, deposition time, ambient gas pressure and laser frequency on the structural and magnetic properties of Nd-Fe-B thin films synthesized by pulsed-laser deposition at high substrate temperature T s. A coercive force of 2.0-2.4 kOe was obtained on samples with a thickness of 70-90 nm and an average grain size of 50-70 nm grown at T s of 620-650°C. We showed a clear trend through statistical analysis that the coercivity decreases with increasing film thickness up to 800 nm due to an increase in the crystalline grain size. Oxidation layer and defects on the grain surface may also have greatly reduced the nucleation field and thus resulted in a low coercivity and low saturation magnetization of the samples. Comparison of the films made by PLD and sputtering under similar conditions has been discussed. © 2002 American Institute of Physics. © 2002 American Institute of Physics.
Source Title: Journal of Applied Physics
URI: http://scholarbank.nus.edu.sg/handle/10635/113075
ISSN: 00218979
DOI: 10.1063/1.1448893
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