Please use this identifier to cite or link to this item: http://scholarbank.nus.edu.sg/handle/10635/112977
Title: FIB precision TEM sample preparation using carbon replica
Authors: Sheng, T.T. 
Goh, G.P.
Tung, C.H. 
Wang, John L.F. 
Cheng, Jeng Kou
Issue Date: 1997
Citation: Sheng, T.T.,Goh, G.P.,Tung, C.H.,Wang, John L.F.,Cheng, Jeng Kou (1997). FIB precision TEM sample preparation using carbon replica. Proceedings of the International Symposium on the Physical & Failure Analysis of Integrated Circuits, IPFA : 92-96. ScholarBank@NUS Repository.
Abstract: A new precision transmission electron microscopy (XTEM) sample preparation method was developed and reported here. No mechanical polishing and grinding are needed. The main difference of this method over conventional method using focused ion beam (FIB) is that the sample sectioned with FIB can be extracted directly from the wafer site and transferred to a holy carbon supporting film for TEM examination. With this technique, a cross section TEM sample can be prepared easily and quickly, thus enhancing both productivity and turnaround time.
Source Title: Proceedings of the International Symposium on the Physical & Failure Analysis of Integrated Circuits, IPFA
URI: http://scholarbank.nus.edu.sg/handle/10635/112977
Appears in Collections:Staff Publications

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