Repetitive variable structure control of micro-actuators with periodic disturbance and parametric uncertainties

Abstract

The demand for higher accuracy and bandwidth motivates dual-stage actuator system which circumvents the limitations of a single-stage positioning system. In this system, the micro-actuator acts as a fine positioning mechanism while the arm continues to perform coarse positioning. We developed a new repetitive learning system for micro-actuator which synthesizes Variable Structure Control (VSC) and repetitive learning to improve tracking accuracy. Proof shows that the tracking error sequence caused by bias force, repeatable runout and uncertain parameters converges to zero on an extended L2 norm. Repetitive learning in frequency-domain avoids the influence from high-frequency noises, resonance modes and other nonrepeatable components.