Please use this identifier to cite or link to this item: https://doi.org/10.1088/0960-1317/10/1/309
Title: Design and analysis of MEMS-based slider suspensions for a high-performance magnetic recording system
Authors: Sheng, G. 
Liu, B. 
Hua, W.
Miao, Y.
Xu, B.
Yan, L.
Sridhar, U.
Issue Date: Mar-2000
Citation: Sheng, G., Liu, B., Hua, W., Miao, Y., Xu, B., Yan, L., Sridhar, U. (2000-03). Design and analysis of MEMS-based slider suspensions for a high-performance magnetic recording system. Journal of Micromechanics and Microengineering 10 (1) : 64-71. ScholarBank@NUS Repository. https://doi.org/10.1088/0960-1317/10/1/309
Abstract: This paper presents a novel design for a MEMS-based slider-suspension device with inherently improved mechanical performance over traditional components for high-performance magnetic recording. The device was modeled numerically to simulate two kinds of micro-dynamics characteristics: the adhesion/shock-induced dynamic deflection of micro-suspension and the particle-deflecting performance of the micro-deflector. The simulation shows that the dynamic deflection of the micro-suspension can be reduced by decreasing the contact area of the attached secondary slider, and that the brittle fracture probability of the micro-suspension under 1000 G shock can be attained to be as low as 1.0×10-5. The simulation also illustrates that the micro-deflector can prevent 80% of flowing particles under the primary slider from entering the micro-system. A new process is also presented and used to fabricate the designs.
Source Title: Journal of Micromechanics and Microengineering
URI: http://scholarbank.nus.edu.sg/handle/10635/112693
ISSN: 09601317
DOI: 10.1088/0960-1317/10/1/309
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