Osterberg, M.Khursheed, A.ELECTRICAL & COMPUTER ENGINEERING2014-06-192014-06-192006Osterberg, M.,Khursheed, A. (2006). A spectroscopic SEM: First results. Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA : 54-57. ScholarBank@NUS Repository. <a href="https://doi.org/10.1109/IPFA.2006.250996" target="_blank">https://doi.org/10.1109/IPFA.2006.250996</a>1424402069https://scholarbank.nus.edu.sg/handle/10635/69084Conference PaperNOT_IN_WOS