Sheng, S.Ong, C.K.PHYSICS2014-10-162014-10-162010-10Sheng, S., Ong, C.K. (2010-10). Distributed transmission line phase shifter using parallel-plate ferroelectric thin film varactors. Microelectronic Engineering 87 (10) : 1932-1934. ScholarBank@NUS Repository. https://doi.org/10.1016/j.mee.2009.11.12601679317https://scholarbank.nus.edu.sg/handle/10635/96254A distributed transmission line phase shifter based on two series connected parallel-plate ferroelectric thin film varactors, which are integrated into single crystal (1 0 0) LaAlO 3 (LAO) wafer, is presented. The equivalent circuit model was simulated by the EM simulation software in an effort to optimize the design. A device with differential phase shifts of 150° at 8 GHz with a low bias voltage of 12 V was realized. © 2009 Elsevier B.V. All rights reserved.Microwave measurementParallel-plate varactorsTransmission line Phase shiftersVoltage tunable dielectricsArticle000280046900021