Please use this identifier to cite or link to this item: https://doi.org/10.1109/TMAG.2011.2151834
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dc.titleInfluence of sputtering gas pressure on high-frequency soft magnetic properties of FeCoN thin film
dc.contributor.authorXu, F.
dc.contributor.authorLiao, Z.
dc.contributor.authorHuang, Q.
dc.contributor.authorOng, C.K.
dc.contributor.authorLi, S.
dc.date.accessioned2014-10-16T09:51:03Z
dc.date.available2014-10-16T09:51:03Z
dc.date.issued2011-10
dc.identifier.citationXu, F., Liao, Z., Huang, Q., Ong, C.K., Li, S. (2011-10). Influence of sputtering gas pressure on high-frequency soft magnetic properties of FeCoN thin film. IEEE Transactions on Magnetics 47 (10) : 3921-3923. ScholarBank@NUS Repository. https://doi.org/10.1109/TMAG.2011.2151834
dc.identifier.issn00189464
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/98757
dc.description.abstractIn this paper, the influences of sputtering gas pressure on the high-frequency soft magnetic properties of FeCoN thin films are investigated. Both the static soft magnetic properties and microwave characteristics of FeCoN thin films are found to be highly dependent on the pressure. The high-frequency magnetic properties are characterized with permeability spectra and discussed based on the Landau-Lifshitz-Gilbert equation. The damping factor changes with sputtering gas pressure, and the resonance frequency shows an extraordinary large tunability with sputtering gas pressure. The effects are suggested to be related to the film stress which is affected by the sputtering pressure. This work provides a convenient method to tune the high-frequency magnetic properties of FeCoN film. © 2011 IEEE.
dc.description.urihttp://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1109/TMAG.2011.2151834
dc.sourceScopus
dc.subjectDamping
dc.subjectpermeability spectra
dc.subjectsoft magnetic thin film
dc.typeConference Paper
dc.contributor.departmentPHYSICS
dc.description.doi10.1109/TMAG.2011.2151834
dc.description.sourcetitleIEEE Transactions on Magnetics
dc.description.volume47
dc.description.issue10
dc.description.page3921-3923
dc.description.codenIEMGA
dc.identifier.isiut000296418200412
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