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https://scholarbank.nus.edu.sg/handle/10635/98753
Title: | Improvement in proton beam writing at the nano scale | Authors: | Van Kan, J.A. Bettiol, A.A. Ansari, K. Shao, P. Watt, F. |
Issue Date: | 2004 | Citation: | Van Kan, J.A.,Bettiol, A.A.,Ansari, K.,Shao, P.,Watt, F. (2004). Improvement in proton beam writing at the nano scale. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) : 673-676. ScholarBank@NUS Repository. | Abstract: | Here we report on the progress of 3D nano machining using MeV protons. In proton beam (p-beam) writing a proton beam is typically focused down to a sub 100 nm spot size and scanned over a resist material (e.g. Su-8 or PMMA). Currently the scanning is performed using a magnetic scan coil which has an intrinsically long settling time. A new scanning system is introduced which employs electrostatic scanning and allows an increase in writing speed up to 2 orders of magnitude. | Source Title: | Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) | URI: | http://scholarbank.nus.edu.sg/handle/10635/98753 | ISSN: | 10846999 |
Appears in Collections: | Staff Publications |
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